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Type of Document Master's Thesis Author Crain, Nathaniel Charles URN etd-04162004-140016 Title Redesign and Refurbishment of a III-V Compound Semiconductor Wet Oxidation System Degree Master of Science in Electrical Engineering Department Electrical Engineering Advisory Committee
Advisor Name Title Dr. Douglas C. Hall Committee Chair Dr. Gregory Snider Committee Member Dr. Thomas H. Kosel Committee Member Keywords
- compound semiconductor
- wet oxidation furnace
Date of Defense 2004-04-02 Availability mixed Abstract The III-V compound semiconductoir wet oxidation system for the Nanofabrication Laboratory at the University of Notre Dame has undergone an extensive redesign and rebuild. Improvements to the various subsystems are described in detail followed by processing techniques and concluded with a set of standard oxidations.Files
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