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Type of Document Master's Thesis Author Anderson, Nicholas Author's Email Address nanderso@nd.edu URN etd-08112004-081951 Title Growth of Alumina from Aluminum Films Using Oxygen Plasma Degree Master of Science in Electrical Engineering Department Electrical Engineering Advisory Committee
Advisor Name Title Greg Snider Committee Chair Debdeep Jena Committee Member Gary Bernstein Committee Member Keywords
- Aluminuma
- Aluminum oxide
- oxidation
Date of Defense 2004-07-23 Availability unrestricted Abstract In this thesis the growth of aluminum oxides, specifically alumina, is described. The research will be applied to single electron memories. The aluminum oxides are grown using a variety of oxygen plasmas. A variety of experimental techniques and setups are described and explained. Preliminary results will be discussed as these guided the changes in the experiments. The changes in setups will then be discussed in order to explain the reasoning behind these changes, and troubleshooting of the techniques is described, and annotated. Final setups and techniques are shown to allow for reproduction. Finally, the results of the experiments are shown and commented on. Lastly, the implications for single electron memories and future work are discussed.Files
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